As we all know, purity is one of the main performance indicators of targets. In practical applications, the
Purity requirements also vary. Compared with the general industrial pure titanium, the high-purity titanium target is expensive and has a narrow range of applications. Mainly used to meet the use of some special industries. So what should be the main high-purity titanium targets? The target manufacturer-Zhongyang Metal, combined with relevant information, shares the following:
1. Biomaterials
Titanium is a non-magnetic metal, it will not be magnetized in a strong magnetic field, and has good compatibility with the human body.
Capacitive, non-toxic and side effects, can be used to manufacture human implantable devices. General medical titanium materials do not reach the level of high-purity titanium, but considering the dissolution of impurities in titanium, the purity of titanium for implants should be as high as possible. The literature also mentioned that high-purity titanium wire can be used as a biological binding material. In addition, the titanium injection needle embedded in the catheter has also reached the high-purity titanium level.
2. Decorative materials
High-purity titanium targets have excellent atmospheric corrosion resistance, and will not change color after long-term use in the atmosphere.
Guarantee the original color of titanium. Therefore, high-purity titanium can also be used as a building decoration material. In addition, in recent years, some high-end ornaments and some wearing objects, such as bracelets, watches and spectacle frames, are made of titanium, which utilizes the characteristics of titanium corrosion resistance, non-discoloration, long-term maintenance of good luster, and non-allergenic contact with human skin. The purity of titanium used in some ornaments has reached the 5N level.
3. Getter material
Titanium, as a chemically very active metal, can interact with many elements and compounds at high temperatures.
react. High-purity titanium is resistant to reactive gases (such as O2, N2, CO, CO2, steam above 650°C)
The Ti film evaporated on the pump wall can form a surface with high adsorption capacity, which makes Ti widely used as a getter in ultra-high vacuum pumping systems. If used in sublimation pump, sputtering ion pump, etc., the limit I pressure of sputtering ion pump can be as low as 10---9Pa.
4. Electronic information materials
In recent years, with the rapid development of high-tech fields such as semiconductor technology and information technology, high-purity titanium
Growing usage in sputtering targets, integrated circuits, DRAMs and flat panel displays
The requirements for the purity of titanium materials are getting higher and higher. In the semiconductor VLSI industry, titanium-silicon compounds, titanium-nitride compounds, tungsten-titanium compounds, etc. are used for control electrodes as diffusion barrier layers and wiring materials. The sputtering method is used to manufacture these materials, and the titanium target used in the sputtering method requires high purity, especially the content of alkali metal elements and radioactive elements is extremely low.
In recent years, its matching sputtering equipment has also begun to use high-purity sputtering titanium targets.
Pure titanium. At present, for 4 megabit VLSI, the purity of titanium is required to reach
4N5 (99.995%) ~ 5N (99.999%) grade, while the 16-megabit third-generation ultra-large-scale integrated circuit requires the purity of titanium to reach 6N (99.9999%) grade.
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