PVD Titanium Target

The density of titanium is 4.506-4.516 grams per cubic centimeter (20°C), which is higher than that of aluminum and lower than that of iron, copper, and nickel. But the specific strength is at the top of the metal. Melting point 1668±4℃ Titanium has poor thermal conductivity and electrical conductivity, similar to or slightly lower than stainless steel, and titanium has superconductivity.

Main performance requirements of PVD Titanium Target: purity is the main performance index of target material, because the purity of target material has a great influence on the performance of the film. But in practice, the purity of target material is not the same. For example, with the rapid development of the microelectronics industry, the size of silicon wafer develops from 6 ", 8 "to 12", and the wiring width decreases from 0.5um to 0.25um,0.18um or even 0.13um. In the past, 99.995% of the target purity can meet the technological requirements of 0.35UMIC. The preparation of 0.18um line requires 99.999% or even 99.9999% purity of target material. Impurity content: Impurities in the solid of the target material and oxygen and water vapor in the pores are the main pollution sources of the deposited films. Different target materials for different purposes have different requirements for different impurity content.

Characteristics of PVD Titanium Target material:

1, the use of phase deposition coating, increase the tool surface strength.

2, the use of advanced technology production of pure metal and scientific advanced novel target material structure design.

3 Use pure metal and alloy target material, high purity, high density, excellent structure, long service life.

4, the product specifications are complete, including circular, circular, rectangular and tubular shapes, sizes can be customized according to user requirements.

Non-ferrous metals, rare metals, mechanical and electrical equipment processing (except smelting) and sales; To engage in import and export of products within the scope of business of the company. (For projects subject to approval according to law, business activities can only be carried out after approval by relevant departments).

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Titanium workpiece has a wide application prospect in aerospace and other fields because of its excellent performance, but it is also restricted by its processing efficiency and production cost. With the development and development of titanium alloy, the increase of titanium material varieties and the decrease of price, the application of titanium in civil industry will increase exponentially, especially in shipbuilding, automobile manufacturing, chemical industry, electronics, Marine development, biomedicine, seawater desalination, geothermal power generation, sewage corrosion and other civil fields will be widely used. At the same time, the market demand will also accelerate the development of titanium industry and titanium material processing technology.

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